Positioning of Large-Scale High-Precision Stage with Vibration Suppression PTC

نویسندگان

  • Koichi Sakata
  • Hiroshi Fujimoto
  • Kazuaki Saiki
چکیده

Abstract: In the positioning system of the large-scale high-precision stage, the primary resonance mode appears in low frequency even in the high stiffness stage. The resonance mode is a major obstacle of fast and precise positioning. In this paper, we apply vibration suppression PTC (Perfect Tracking Control) which can control the resonance mode actively on the largescale stage. Finally, simulations and experiments are performed to show the advantages of the vibration suppression PTC.

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تاریخ انتشار 2008